INFLUENCE OF THE AMORPHOUS PHASE ON BORON ATOM DISTRIBUTIONS IN ION IMPLANTED SILICON. INFLUENCE OF THE AMORPHOUS PHASE ON BORON ATOM DISTRIBUTIONS IN ION IMPLANTED SILICON.
Data source
Japan Atomic Energy Agency's Library Catalog
A search system for the collections of the Japan Atomic Energy Agency central library. Books, reports, meeting materials, magazines and dockets collected by the library are searchable.
Last updated
July 18, 2022