USE OF PERFLUOROCARBON TRACER (PFT) TECHNOLOGY TO DETERMINE FINE LEAKS IN HERMETICITY TESTING OF SEMICONDUCTOR DEVICES USE OF PERFLUOROCARBON TRACER (PFT) TECHNOLOGY TO DETERMINE FINE LEAKS IN HERMETICITY TESTING OF SEMICONDUCTOR DEVICES
Data source
Japan Atomic Energy Agency's Library Catalog
A search system for the collections of the Japan Atomic Energy Agency central library. Books, reports, meeting materials, magazines and dockets collected by the library are searchable.
Last updated
July 18, 2022