RESULTS OF A PILOT STUDY AND A PROPOSAL TO BUILD A HIGH CURRENT PULSED NANOSECOND LOW ENERGY SI ION BEAM FOR THE DETECTION OF TRACE AMOUNTS OF HEAVY IMPURITIES IN SILICON RESULTS OF A PILOT STUDY AND A PROPOSAL TO BUILD A HIGH CURRENT PULSED NANOSECOND LOW ENERGY SI ION BEAM FOR THE DETECTION OF TRACE AMOUNTS OF HEAVY IMPURITIES IN SILICON
Data source
Japan Atomic Energy Agency's Library Catalog
A search system for the collections of the Japan Atomic Energy Agency central library. Books, reports, meeting materials, magazines and dockets collected by the library are searchable.
Last updated
July 18, 2022