FORMATION OF A BURIED SOFT LAYER IN SIC FOR COMPLIANT SUBSTRATE BY ION IMPLANTATION FORMATION OF A BURIED SOFT LAYER IN SIC FOR COMPLIANT SUBSTRATE BY ION IMPLANTATION
Data source
Japan Atomic Energy Agency's Library Catalog
A search system for the collections of the Japan Atomic Energy Agency central library. Books, reports, meeting materials, magazines and dockets collected by the library are searchable.
Last updated
July 25, 2022