FORMATION AND CHARACTERIZATION OF TITANIUM NITRIDE AND TITANIUM CARBIDE FILMS PREPARED BY REACTIVE SPUTTERING. FORMATION AND CHARACTERIZATION OF TITANIUM NITRIDE AND TITANIUM CARBIDE FILMS PREPARED BY REACTIVE SPUTTERING.
Data source
Japan Atomic Energy Agency's Library Catalog
A search system for the collections of the Japan Atomic Energy Agency central library. Books, reports, meeting materials, magazines and dockets collected by the library are searchable.
Last updated
August 22, 2022